T. Bearda: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Use of Surface Haze for Evaluation of Photoresist Residue Removal Efficiency

Halder, S., Vos, R., Masayuki, W., Kenis, K., Bearda, T., Radovanovic, S., Dighe, P., Leunissen, L.H.A., Mertens, P.W.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2009

Language:

english

File:

PDF, 1.65 MB

english, 2009

2

Particle Removal Efficiency and Damage Analysis on Silicon Wafers after Megasonic Cleaning in Solvents

Barbagini, Francesca, Halder, Sandip, Janssens, Tom, Kenis, Karine, Wostyn, Kurt, Bearda, Twan, Quoc, Toan-Le, Leunissen, Peter, Mertens, Paul, Kim, Kyung-Hyun, Andreas, Michael

Journal:

Journal of Adhesion Science and Technology

Year:

2009

Language:

english

File:

PDF, 939 KB

english, 2009

3

Silicon heterojunction interdigitated back-contact solar cells bonded to glass with efficiency >21%

Xu, Menglei, Bearda, Twan, Sivaramakrishnan Radhakrishnan, Hariharsudan, Kiran Jonnak, Shashi, Hasan, Mahmudul, Malik, Shuja, Filipič, Miha, Depauw, Valérie, Van Nieuwenhuysen, Kris, Abdulraheem, Yase

Journal:

Solar Energy Materials and Solar Cells

Year:

2017

Language:

english

File:

PDF, 874 KB

english, 2017

4

Freestanding and supported processing of sub-70 μm kerfless epitaxial Si and thinned Cz/FZ Si foils into solar cells: An overview of recent progress and challenges

Sivaramakrishnan Radhakrishnan, Hariharsudan, Cho, Jinyoun, Bearda, Twan, Röth, Julius, Depauw, Valérie, Van Nieuwenhuysen, Kris, Gordon, Ivan, Szlufcik, Jozef, Poortmans, Jef

Journal:

Solar Energy Materials and Solar Cells

Year:

2019

Language:

english

File:

PDF, 3.48 MB

english, 2019

5

Advanced cleaning for the growth of ultrathin gate oxide

P.W. Mertens, T. Bearda, M. Houssa, L.M. Loewenstein, I. Cornelissen, S. De Gendt, K. Kenis, I. Teerlinck, R. Vos, M. Meuris, M.M. Heyns

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 664 KB

english, 1999

6

11-Megapixel CMOS-Integrated SiGe Micromirror Arrays for High-End Applications

Witvrouw, Ann, Haspeslagh, Luc, Varela Pedreira, Olalla, De Coster, Jeroen, De Wolf, Ingrid, Tilmans, Harrie A. C., Bearda, Twan, Schlatmann, Bart, van Bommel, Mark, de Nooijer, Marie-Christine, Magne

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 2.51 MB

english, 2010

7

Cost-effective cleaning and high-quality thin gate oxides

Heyns, M. M., Bearda, T., Cornelissen, I., DeGendt, S., Degraeve, R., Groeseneken, G., Kenens, C., Knotter, D. M., Loewenstein, L. M., Mertens, P. W., Mertens, S., Meuris, M., Nigam, T., Schaekers, M.

Journal:

IBM Journal of Research and Development

Year:

1999

Language:

english

File:

PDF, 664 KB

english, 1999

8

Observation of critical gate oxide thickness for substrate-defect related oxide failure

T. Bearda, M. Houssa, P. W. Mertens, J. Vanhellemont, M. Heyns

Year:

1999

Language:

english

File:

PDF, 304 KB

english, 1999

9

Wet chemical treatment of boron doped emitters on n-type (100) c-Si prior to amorphous silicon passivation

Meddeb, H., Bearda, T., Recaman Payo, M., Abdelwahab, I., Abdulraheem, Y., Ezzaouia, H., Gordon, I., Szlufcik, J., Poortmans, J.

Journal:

Applied Surface Science

Year:

2015

Language:

english

File:

PDF, 1.01 MB

english, 2015

10

Influence of substrate potential on a-Si:H passivation of Si foils bonded to glass

Granata, S.N., Bearda, T., Xu, M.L., Abdulraheem, Y., Gordon, I., Mertens, R., Poortmans, J.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 521 KB

english, 2015

11

Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing

Müller, Timo, Obermeier, G., Bearda, T., Huber, A., Schmolke, R., von Ammon, Wilfried, Lerch, Wilfried

Journal:

Solid State Phenomena

Year:

2002

File:

PDF, 442 KB

2002

12

Kerfless layer-transfer of thin epitaxial silicon foils using novel multiple layer porous silicon stacks with near 100% detachment yield and large minority carrier diffusion lengths

Sivaramakrishnan Radhakrishnan, Hariharsudan, Martini, Roberto, Depauw, Valerie, Van Nieuwenhuysen, Kris, Bearda, Twan, Gordon, Ivan, Szlufcik, Jozef, Poortmans, Jef

Journal:

Solar Energy Materials and Solar Cells

Year:

2015

Language:

english

File:

PDF, 2.48 MB

english, 2015

13

High Velocity Aerosol Cleaning with Organic Solvents: Particle Removal and Substrate Damage

Andreas, Michael T., Wostyn, Kurt, Wada, Masayuki, Janssens, Tom, Kenis, Karine, Bearda, Twan, Mertens, Paul W.

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 1.05 MB

english, 2009

14

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Post Ion-Implant Photoresist Removal via Wet Chemical Cleans Combined with Physical Force Pretreatments

Totir, George G., Frank, Martin, Vos, Rita, Arnauts, Sophia, Bearda, Twan, Kenis, Karine, Delande, Martine, Le, QuocToan, Kesters, Els, Vereecke, Guy, Mannaert, Geert, Lux, Marcel, Hoflijk, Ilse, Cona

Year:

2007

Language:

english

File:

PDF, 854 KB

english, 2007

15

RCA and IMEC/SC2 Clean: Metallic Immunity and Gate Oxide Integrity

Chen, Weidong, Dhayagude, Tushar, Chaparala, Prasad, Demirlioglu, Esin, Shenasa, Mohsen, Bearda, Twan, Arnauts, Sophia, Meuris, Marc

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 333 KB

english, 1997

16

Simple emitter patterning of silicon heterojunction interdigitated back-contact solar cells using damage-free laser ablation

Xu, Menglei, Bearda, Twan, Filipič, Miha, Radhakrishnan, Hariharsudan Sivaramakrishnan, Gordon, Ivan, Szlufcik, Jozef, Poortmans, Jef

Journal:

Solar Energy Materials and Solar Cells

Year:

2018

Language:

english

File:

PDF, 1.46 MB

english, 2018

17

Ab initio calculations on the dissociation of the CF4+• radical ion

R.A. Beärda, J.J.C. Mulder

Journal:

Chemical Physics

Year:

1988

Language:

english

File:

PDF, 915 KB

english, 1988

18

Ab initio calculations on the group IV tetrafluoride radical cations

R.A. Beärda, H.R.R. Wiersinga, J.F.M. Aarts, J.J.C. Mulder

Journal:

Chemical Physics

Year:

1989

Language:

english

File:

PDF, 526 KB

english, 1989

19

Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

M. Hauptmann, S. Brems, E. Camerotto, A. Zijlstra, G. Doumen, T. Bearda, P.W. Mertens, W. Lauriks

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 293 KB

english, 2010

20

Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch-total reflection X-ray fluorescence spectrometry

D Hellin, T Bearda, C Zhao, G Raskin, P.W Mertens, S De Gendt, M.M Heyns, C Vinckier

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2003

Language:

english

File:

PDF, 348 KB

english, 2003

21

Crystalline thin-foil silicon solar cells: where crystalline quality meets thin-film processing

Frederic Dross, Kris Baert, Twan Bearda, Jan Deckers, Valerie Depauw, Ounsi El Daif, Ivan Gordon, Adel Gougam, Jonathan Govaerts, Stefano Granata, Riet Labie, Xavier Loozen, Roberto Martini, Alex Maso

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2012

Language:

english

File:

PDF, 6.65 MB

english, 2012

22

Electrical, optical and materials properties of ion beam synthesised (IBS) FeSi2

K.J. Reeson, M.S. Finney, M.A. Harry, S.V. Hutchinson, Y.S. Tan, D. Leong, T.R. Bearda, Z. Yang, G. Curello, K.P. Homewood, R.M. Gwilliam, B.J. Sealy

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1995

Language:

english

File:

PDF, 889 KB

english, 1995

23

Passivation of a Metal Contact with a Tunneling Layer

X. Loozen, J.B. Larsen, F. Dross, M. Aleman, T. Bearda, B.J. O'Sullivan, I. Gordon, J. Poortmans

Journal:

Energy Procedia

Year:

2012

Language:

english

File:

PDF, 638 KB

english, 2012

24

Atomic and Electrical Characterisation of Amorphous Silicon Passivation Layers

B.J. O'Sullivan, N.H. Thoan, M. Jivanescu, L. Pantisano, T. Bearda, F. Dross, I. Gordon, V. Afanas’ev, A. Stesmans, J. Poortmans

Journal:

Energy Procedia

Year:

2012

Language:

english

File:

PDF, 465 KB

english, 2012

25

Effect of an in-Situ H2 Plasma Pretreatment on the Minority Carrier lifetime of a-Si:H(i) Passivated Crystalline Silicon

S.N. Granata, T. Bearda, F. Dross, I. Gordon, J. Poortmans, R. Mertens

Journal:

Energy Procedia

Year:

2012

Language:

english

File:

PDF, 681 KB

english, 2012

26

Development of a-Si:H/c-Si heterojunctions for the i2-module concept: Low-temperature passivation and emitter formation on wafers bonded to glass

Govaerts, Jonathan, Nicola Granata, Stefano, Bearda, Twan, Dross, Frederic, Boulord, Caroline, Beaucarne, Guy, Korsos, Ferenc, Baert, Kris, Gordon, Ivan, Poortmans, Jef

Journal:

Solar Energy Materials and Solar Cells

Year:

2013

Language:

english

File:

PDF, 1.56 MB

english, 2013

27

Plasma–silicone interaction during a-Si:H deposition on solar cell wafers bonded to glass

Granata, Stefano Nicola, Boulord, Caroline, Govaerts, Jonathan, Bearda, Twan, Beaucarne, Guy, Soogund, Deana, Pérez, Raquel Vaquer, Dross, Frederic, Abdulraheem, Yaser, Poortmans, Jef, Mertens, Robert

Journal:

Solar Energy Materials and Solar Cells

Year:

2014

Language:

english

File:

PDF, 1.60 MB

english, 2014

28

18% Efficiency IBC Cell With Rear-Surface Processed on Quartz

Dross, F., O'Sullivan, B., Debucquoy, M., Bearda, T., Govaerts, J., Labie, R., Loozen, X., Granata, S., El Daif, O., Trompoukis, C., Van Nieuwenhuysen, K., Meuris, M., Gordon, I., Posthuma, N., Baert,

Journal:

IEEE Journal of Photovoltaics

Year:

2013

Language:

english

File:

PDF, 576 KB

english, 2013

29

[IEEE 2012 IEEE 38th Photovoltaic Specialists Conference (PVSC) - Austin, TX, USA (2012.06.3-2012.06.8)] 2012 38th IEEE Photovoltaic Specialists Conference - High-quality epitaxial foils, obtained by a layer transfer process, for integration in back-contacted solar cells processed on glass

Van Nieuwenhuysen, Kris, Gordon, Ivan, Bearda, Twan, Boulord, Caroline, Debucquoy, Maarten, Depauw, Valerie, Dross, Frederic, Govaerts, Jonathan, Granata, Stefano, Labie, Riet, Loozen, Xavier, Martini

Year:

2012

Language:

english

File:

PDF, 988 KB

english, 2012

30

[IEEE International Electron Devices Meeting 1998. Technical Digest - San Francisco, CA, USA (6-9 Dec. 1998)] International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) - Cost-effective cleaning for advanced Si-processing

Heyns, M.M., Bearda, T., Cornelissen, I., De Gendt, S., Knotter, D.M., Loewenstein, L.M., Lux, M., Mertens, P.W., Mertens, S., Meuris, M., Schaekers, M., Snee, P., Teerlinck, I., Vos, R.

Year:

1998

Language:

english

File:

PDF, 589 KB

english, 1998

31

Thermal, Structural and Electrical Study of the Effect of Annealing on the Passivation by Amorphous Silicon of n-type Crystalline (100) Silicon Surfaces

Meddeb, Hosny, Bearda, Twan, Abdelwahab, Ibrahim, Ferro, Valentina, O'Sullivan, Barry, Abdulraheem, Yaser, Ezzaouia, Hatem, Gordon, Ivan, Szlufcik, Jozef, Poortmans, Jef

Journal:

Energy Procedia

Year:

2014

Language:

english

File:

PDF, 1.16 MB

english, 2014

32

[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Wonderful new materials or yield killers? New metrics for metal contamination assessment

Catana, Gabriela, Bearda, Twan, Hellin, David, Vos, Rita

Year:

2006

Language:

english

File:

PDF, 1.33 MB

english, 2006

33

[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Approach for a Standardized Methodology for Multi-Site Processing of 300mm Wafers at R&D-Sites

Oechsner, R., Frickinger, J., Pfeffer, M., Schellenberger, M., Roeder, G., Pfitzner, L., Ryssel, H., Fritzsche, M., Kaushik, V., Renaud, D., Danel, A., Claeys, C., Bearda, T., Lering, M., Graef, M., M

Year:

2006

Language:

english

File:

PDF, 2.88 MB

english, 2006

34

[IEEE 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Cambridge, MA, USA (2008.05.5-2008.05.7)] 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Use of Corona Charge Photo-Conductance Decay (Charge-PCD) for fast metal contamination monitoring of high temperature processes

Huyghebaert, C., Bearda, T., Rosseel, E., Everaert, J. L., Don, E., Pavelka, T.

Year:

2008

Language:

english

File:

PDF, 731 KB

english, 2008

35

[Japan Soc. Appl. Phys 2001 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (12-14 June 2001)] 2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184) - Consistent model for short-channel nMOSFET post-hard-breakdown characteristics

Kaczer, B., Degraeve, R., De Keersgieter, A., Van de Mieroop, K., Bearda, T., Groeseneken, G.

Year:

2001

Language:

english

File:

PDF, 269 KB

english, 2001

36

[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Packaging of 11 MPixel CMOS-Integrated SiGe Micro-Mirror Arrays

Witvrouw, A., Tilmans, H.A.C., Bogaerts, L., De Moor, P., Bearda, T., Halder, S., Haspeslagh, L., Schlatmann, B., van Bommel, M., de Nooijer, C., Lauria, J., Vanneer, R., van Drieenhuizen, B.

Year:

2009

Language:

english

File:

PDF, 4.41 MB

english, 2009

37

Approach for a Standardized Methodology for Multisite Processing of 300-mm Wafers at R&D Sites

Oechsner, Richard, Pfeffer, M., Frickinger, J., Schellenberger, M., Roeder, G., Pfitzner, L., Ryssel, H., Fritzsche, M., Kaushik, V., Renaud, D., Danel, A., Claeys, C., Bearda, T., Lering, M., Graef,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 569 KB

english, 2007

38

Heterojunction Interdigitated Back-Contact Solar Cells Fabricated on Wafer Bonded to Glass

Granata, Stefano N., Aleman, Monica, Bearda, Twan, Govaerts, Jonathan, Brizzi, Mariella, Abdulraheem, Yaser, Gordon, Ivan, Poortmans, Jef, Mertens, Robert

Journal:

IEEE Journal of Photovoltaics

Year:

2014

Language:

english

File:

PDF, 517 KB

english, 2014

39

Resistance and passivation of metal contacts using n-type amorphous Si for Si solar cells

Labie, Riet, Bearda, Twan, El Daif, Ounsi, O'Sullivan, Barry, Baert, Kris, Gordon, Ivan

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.82 MB

english, 2014

40

[IEEE 2009 IEEE 59th Electronic Components and Technology Conference (ECTC 2009) - San Diego, CA, USA (2009.05.26-2009.05.29)] 2009 59th Electronic Components and Technology Conference - Post-dicing particle control for 3D stacked IC integration flows

Bearda, Twan, Travaly, Youssef, Wostyn, Kurt, Halder, Sandip, Swinnen, Bart, Molders, Thomas, Varghese, Ivin, Cheng, Paul

Year:

2009

Language:

english

File:

PDF, 1.89 MB

english, 2009

41

Optical bandgap of ultra-thin amorphous silicon films deposited on crystalline silicon by PECVD

Abdulraheem, Yaser, Gordon, Ivan, Bearda, Twan, Meddeb, Hosny, Poortmans, Jozef

Journal:

Year:

2014

Language:

english

File:

PDF, 1.53 MB

english, 2014

42

Silicone oxidation for a-Si:H passivation of wafers bonded to glass

Granata, Stefano Nicola, Bearda, Twan, Beaucarne, Guy, Abdulraheem, Yaser, Gordon, Ivan, Poortmans, Jef, Mertens, Robert

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2014

Language:

english

File:

PDF, 501 KB

english, 2014

43

[IEEE 2006 International Symposium on VLSI Technology, Systems, and Applications - Hsinchu, Taiwan (2006.4.24-2006.4.24)] 2006 International Symposium on VLSI Technology, Systems, and Applications - Roadblocks and Critical Aspects of Cleaning for Sub-65nm Technologies

Mertens, Paul, Vereecke, G., Vos, R., Arnauts, S., Barbagini, F., Bearda, T., Degendt, S., Demaco, C., Eitoku, A., Frank, M., Fyen, W., Hall, L., Hellin, D., Holsteyns, F., Kesters, E., Claes, M., Kim

Year:

2006

Language:

english

File:

PDF, 3.26 MB

english, 2006

44

Process-Induced Degradation of SiO$_{\bf 2}$ and a-Si:H Passivation Layers for Photovoltaic Applications

O'Sullivan, B. J., Bearda, T., Nadupalli, S., Labie, R., Baert, K., Gordon, I., Poortmans, J.

Journal:

IEEE Journal of Photovoltaics

Year:

2014

Language:

english

File:

PDF, 642 KB

english, 2014

45

[IEEE 2010 35th IEEE Photovoltaic Specialists Conference (PVSC) - Honolulu, HI, USA (2010.06.20-2010.06.25)] 2010 35th IEEE Photovoltaic Specialists Conference - Interdigitated rear contact solar cells with amorphous silicon heterojunction emitter

O'Sullivan, B.J., Bearda, T., Qiu, Y., Robbelein, J., Gong, C., Posthuma, N.E., Gordon, I., Poortmans, J.

Year:

2010

Language:

english

File:

PDF, 1.03 MB

english, 2010

46

Ultra high amorphous silicon passivation quality of crystalline silicon surface using in-situ post-deposition treatments

Meddeb, H., Bearda, Twan, Dimassi, Wissem, Abdulraheem, Yaser, Ezzaouia, Hatem, Gordon, Ivan, Szlufcik, Jozef, Poortmans, Jef

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2015

Language:

english

File:

PDF, 467 KB

english, 2015

47

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Electrochemical and Analytical Study of the Si Etching Mechanism in HF

Valckx, Nick, Vos, Rita, Rip, Jens, Doumen, Geert, Mertens, Paul, Bearda, Twan, Heyns, Marc M., De Gendt, Stefan

Year:

2009

Language:

english

File:

PDF, 202 KB

english, 2009

48

Hydrogen-plasma etching of thin amorphous silicon layers for heterojunction interdigitated back-contact solar cells

Granata, Stefano. N., Bearda, Twan, Gordon, Ivan, Poortmans, Jef, Mertens, Robert

Journal:

MRS Proceedings

Year:

2013

Language:

english

File:

PDF, 249 KB

english, 2013

49

Behaviour of Metallic Contaminants during Mos Processing

Bearda, Twan, De Gendt, Stefan, Loewenstein, Lee M., Knotter, M., Mertens, Paul W., Heyns, Marc M.

Journal:

Solid State Phenomena

Year:

1999

File:

PDF, 350 KB

1999

50

Optimization of Post-Texturization Cleans for Heterojunction Solar Cells

Bearda, Twan, Yoshikawa, Kunta, van Assche, Elisabeth, O’Sullivan, Barry, Gordon, Ivan, Yamamoto, Kenji, Baert, Kris, Poortmans, Jef

Journal:

Solid State Phenomena

Year:

2012

Language:

english

File:

PDF, 562 KB

english, 2012

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски